In the inertial measurement system of the spacecraft, the inclination measurement of the vehicle, the balance posture detection of the robot, the posture detection of the body, and the like, it is necessary to measure the inclination angle of the object. The MEMS acceleration sensor is used to measure the tilt angle, and has the characteristics of small size, light weight, low cost, and mechanical mechanism that does not affect the object to be measured.
The current accelerometers are available in a variety of ways, mainly in the piezoelectric, capacitive, and thermal sensing styles. Each of these three technologies has its advantages and disadvantages. Take the technical principle of a capacitive three-axis accelerometer as an example. Capacitive accelerometers can sense motion conditions such as acceleration or vibration in different directions. The utility model mainly designs a movable mechanism which utilizes the mechanical properties of silicon. The mechanism mainly comprises two sets of silicon comb teeth, one set is fixed, and the other group moves with the moving object; the former is equivalent to a fixed electrode, and the latter functions as a fixed electrode. Moveable electrode. When the movable comb teeth are displaced, a change in the capacitance value proportional to the displacement is produced.
Most of the current three-axis accelerometers use piezoresistive, piezoelectric and capacitive operating principles, and the resulting acceleration is proportional to changes in resistance, voltage, and capacitance, and is collected by corresponding amplification and filtering circuits. This and the ordinary acceleration sensor are based on the same principle, so in a certain technology, three single axes can be turned into a three-axis. For most sensor applications, two-axis accelerometers are already available for most applications. However, some applications are concentrated in three-axis accelerometers such as digital mining equipment, valuable asset monitoring, collision monitoring, measuring building vibrations, wind turbines, wind turbines and other sensitive large structural vibrations.
As the basic component of the inertial navigation system, the three-axis accelerometer is widely used in the aviation field, and the signal transmission between it and the system controller, processor and memory is mainly carried out through the space bus.
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